Laser invisible scribing device based on machine learning graph automatic identification

The invention discloses a laser invisible scribing device based on machine learning graph automatic identification, which comprises a workbench, a processing device, a controller and a camera device, and is characterized in that the workbench is configured to be used for bearing a wafer; the process...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUN XIAODAN, YI FEIYUE, ZHANG LIJIANG, YAN HUIYU, ZHANG BIAO, LI BAODI, YANG SHUNKAI, LI JIDONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a laser invisible scribing device based on machine learning graph automatic identification, which comprises a workbench, a processing device, a controller and a camera device, and is characterized in that the workbench is configured to be used for bearing a wafer; the processing device is arranged on the workbench and is opposite to the wafer, the processing device is configured to provide laser, and the laser acts on the wafer under the control of the processing device so as to cut the wafer; the controller is configured to be in communication connection with the processing device, and the controller is used for generating a wafer cutting route according to the image information of the wafer and controlling the processing device to cut the wafer according to the wafer cutting route; the camera device is arranged opposite to the workbench, the camera device is in communication connection with the controller, and the camera device is used for collecting image information of the wafer bo