Data acquisition method, CTC equipment and data acquisition system

The embodiment of the invention provides a data acquisition method, CTC equipment and a data acquisition system.The method is applied to a clustering equipment control program CTC equipment end, the CTC equipment end is connected with an equipment data acquisition EDA server, and the method comprises the steps that a technological parameter number needing to be acquired and a corresponding acquisition frequency sent by the EDA server are received; determining a target acquisition frequency grade according to the acquisition frequency, and obtaining a target timer corresponding to the target acquisition frequency grade; and collecting the process parameters corresponding to the process parameter numbers according to the time interval set by the target timer, and storing the process parameters in a data cache region. According to the invention, the timers can be set according to different acquisition frequency levels, and then the target acquisition frequency level is determined according to the acquisition fre