Air bridge inductor structure, manufacturing method and application
The invention discloses an air bridge inductor structure which comprises two metal layers, a first metal layer and a second metal layer are provided with annular main bodies which are correspondingly arranged at intervals from top to bottom, each annular main body is provided with a breaking notch,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an air bridge inductor structure which comprises two metal layers, a first metal layer and a second metal layer are provided with annular main bodies which are correspondingly arranged at intervals from top to bottom, each annular main body is provided with a breaking notch, a first pin and a second pin, and the two annular main bodies are connected through an interlayer connecting part. The total number of turns between the first pin and the second pin is more than one and less than two; the second metal layer further comprises a plurality of first supporting feet, and the first supporting feet extend outwards in the radial direction from the outer periphery of the annular body of the second metal layer and are supported on the substrate through one-time bending. The annular body of the second metal layer is covered with an insulating layer with the relative dielectric constant smaller than 5. The Q value of the inductor is improved, and when the inductor is applied to a filter, the i |
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