Multi-channel HF aqueous solution filling system and method thereof

The invention discloses a multi-channel HF aqueous solution filling system and method, and relates to the technical field of HF aqueous solution filling. According to the multi-channel HF aqueous solution filling system and method, when HF aqueous solution filling operation is carried out, a filling...

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Bibliographische Detailangaben
Hauptverfasser: YANG DENGQIANG, WANG CHAYING, WU JUNXIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a multi-channel HF aqueous solution filling system and method, and relates to the technical field of HF aqueous solution filling. According to the multi-channel HF aqueous solution filling system and method, when HF aqueous solution filling operation is carried out, a filling bottle is placed in a placing bottom frame, then a second hydraulic cylinder is adjusted to drive a hollow embedded ring frame to move to a filling bottle opening, an electric telescopic rod is adjusted to drive a sealing cover to move downwards, and then the filling bottle is placed in the placing bottom frame; the space between a hollow embedded ring frame and a filling bottle is sealed, a vacuum pump is started, the interior of the filling bottle is vacuumized through a vacuumizing hole, the influence of air on storage of the HF aqueous solution is avoided, meanwhile, after filling is finished, a third hydraulic cylinder is adjusted to drive a pushing curved rod to push all knocking blocks, the knocking blocks