Manipulator of transfer machine for transferring wafer or chip tray

The invention provides a manipulator of a transfer machine for transferring a wafer or a chip tray. The manipulator comprises a cylinder assembly mounted on a mechanical arm; the clamping arms are movably mounted at the opposite ends of the air cylinder assembly, and the clamping arms can move oppositely to clamp the tray or move away from each other to loosen the tray under the action of an air cylinder; the mechanical arm is characterized in that the mechanical arm further comprises a cover plate which is arranged between the pair of clamping arms and installed on the air cylinder assembly, the side, facing the tray to be clamped, of the cover plate is provided with a flat surface, and the cover plate is arranged to cover the tray when the tray is clamped by the mechanical arm. According to the invention, the slightly displaced wafer or chip can be pushed back into the groove on the tray, and the wafer or chip can be prevented from displacing or flying out of the groove on the tray. Therefore, the yield of