Method for producing micromechanical component for sensor or microphone device

The invention relates to a method for producing a micromechanical component for a sensor or microphone device, comprising the following steps: forming a support structure (10) from a first sacrificial material on a substrate surface (12a) of a substrate (12), the support structure has a first sacrif...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FRIEDRICH THOMAS, ALTMAN HEMAN, SCHMOLLNGRUBER PETER, SCHEUERLE ANDREAS, WEBER HEIKE, SCHILLER UWE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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