Ion extraction grid electrode, ion source and manufacturing method of ion extraction grid electrode

The embodiment of the invention provides an ion extraction grid electrode, an ion source and a manufacturing method of the ion extraction grid electrode. The cross section of the ion extraction grid is arc-shaped; a plurality of hole parts which penetrate through the ion extraction grid and of which the central axes are straight lines are formed in the ion extraction grid; wherein the central axis of at least one part of the plurality of hole parts is not perpendicular to the tangent line of the surface of the ion extraction grid electrode around the hole parts, and/or the thickness of the ion extraction grid electrode is determined according to the size of the hole parts and the interval between the adjacent hole parts. Therefore, ions can efficiently pass through the hole part of the ion extraction grid, so that the efficiency of the ion source is further improved; in addition, the ion beam extraction efficiency of the grid electrode can be improved, so that the ion beam density is increased, the mechanical