High-overload pressure sensor and preparation method thereof

The invention relates to a high-overload pressure sensor and a preparation method thereof, the high-overload pressure sensor comprises a silicon cup, a silicon boss and glass, the silicon cup, the silicon boss and the glass are sequentially arranged from top to bottom, the glass is in anodic bonding with the silicon cup and the silicon boss, and the silicon boss is arranged on the silicon cup. A vacuum gap is formed among the lower surface of the silicon cup, the upper surface of the silicon boss and the upper surface of the glass, four piezoresistors are arranged on the upper surface of the silicon cup, and the four piezoresistors form a Wheatstone bridge. According to the high-overload pressure sensor and the preparation method thereof provided by the embodiment of the invention, by designing the structure of the pressure sensor, the anti-overload capability of the pressure sensor can be effectively improved, the stability and the reliability of the sensor are improved, and the provided high-overload pressu