Purification device and purification method for medical grade sulfur hexafluoride
The invention provides a purification device and a purification method for medical grade sulfur hexafluoride. The purification device comprises a shell as well as an MOF adsorption layer, an aluminum oxide adsorption layer and a particle filtering layer which are sequentially arranged in the shell f...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a purification device and a purification method for medical grade sulfur hexafluoride. The purification device comprises a shell as well as an MOF adsorption layer, an aluminum oxide adsorption layer and a particle filtering layer which are sequentially arranged in the shell from top to bottom, the height ratio of the MOF adsorption layer to the aluminum oxide adsorption layer is 1: (2.5-3.5). The purification method comprises the following steps: introducing a sulfur hexafluoride raw material into the purification device, sequentially carrying out primary adsorption through the MOF adsorption layer, carrying out secondary adsorption through the aluminum oxide layer, and filtering through the particle filtering layer, so as to obtain the medical grade sulfur hexafluoride. By adopting the purification device and the purification method disclosed by the invention, impurity gases in industrial grade sulfur hexafluoride can be effectively adsorbed, and high-purity medical grade sulfur hexaf |
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