Integrated bionic compound eye template structure and preparation method thereof

The invention discloses an integrated bionic compound eye template structure and a preparation method thereof, and belongs to the technical field of laser micro-nano machining, and the integrated bionic compound eye template structure can be prepared very simply and conveniently by utilizing femtose...

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Bibliographische Detailangaben
Hauptverfasser: LIU XUEQING, CHEN QIDAI, QI JINYONG, SUN HONGBO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an integrated bionic compound eye template structure and a preparation method thereof, and belongs to the technical field of laser micro-nano machining, and the integrated bionic compound eye template structure can be prepared very simply and conveniently by utilizing femtosecond laser to carry out periodical and uniform modification and point distribution in a plane sample in advance and combining an etching process of ion beam one-step forming. According to the method, femtosecond laser is adopted to modify distribution points in advance, only the femtosecond laser needs to be focused into a plane sample, expected surface type distribution of subsequent ion beam etching does not need to be known, converged ion beams are incident to a distribution point area, a millimeter-scale lens is etched, meanwhile, a pre-modified area can be formed on a three-dimensional curved surface of the lens, and the surface distribution of the lens is modified in advance. And a micron-scale lens can be sy