Substrate inspection apparatus and substrate inspection method
Provided are a substrate inspection apparatus and a substrate inspection method, the substrate inspection apparatus including: an image sensor that photographs a first substrate to obtain first image data for the first substrate, and photographs a second substrate to obtain second image data for the...
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| creator | SHIN EON-PIL KIM MYUNGUL LONG WENQING LEE DONG-HOON KIM TAE-JOON SEO JI-HOON JUNG JI-YONG |
| description | Provided are a substrate inspection apparatus and a substrate inspection method, the substrate inspection apparatus including: an image sensor that photographs a first substrate to obtain first image data for the first substrate, and photographs a second substrate to obtain second image data for the second substrate; and a processor that obtains composite image data using the first image data and the second image data, the processor obtaining (1-1)-th information for a (1-1)-th stain region on the first substrate and first information for a first non-stain region on the first substrate based on the first image data, obtaining, on the basis of the second image data, 2-1 information for a 2-1 stain region at a position on the second substrate corresponding to the position of the 1-1 stain region on the first substrate, and second information for a second non-stain region at a position on the second substrate corresponding to the position of the first non-stain region on the first substrate; the composite image |
| format | Patent |
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| language | chi ; eng |
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| subjects | COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS RADIATION PYROMETRY TESTING |
| title | Substrate inspection apparatus and substrate inspection method |
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