Substrate inspection apparatus and substrate inspection method

Provided are a substrate inspection apparatus and a substrate inspection method, the substrate inspection apparatus including: an image sensor that photographs a first substrate to obtain first image data for the first substrate, and photographs a second substrate to obtain second image data for the second substrate; and a processor that obtains composite image data using the first image data and the second image data, the processor obtaining (1-1)-th information for a (1-1)-th stain region on the first substrate and first information for a first non-stain region on the first substrate based on the first image data, obtaining, on the basis of the second image data, 2-1 information for a 2-1 stain region at a position on the second substrate corresponding to the position of the 1-1 stain region on the first substrate, and second information for a second non-stain region at a position on the second substrate corresponding to the position of the first non-stain region on the first substrate; the composite image