Vapor deposition device, vapor deposition method and organic light-emitting display panel

The invention relates to the technical field of display, and discloses an evaporation device, an evaporation method and an organic light-emitting display panel, the evaporation device comprises an evaporation cavity, and an alignment mechanism, a to-be-evaporated substrate, a mask plate, a baffle pl...

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Hauptverfasser: FAN LIUJING, DONG QINGQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of display, and discloses an evaporation device, an evaporation method and an organic light-emitting display panel, the evaporation device comprises an evaporation cavity, and an alignment mechanism, a to-be-evaporated substrate, a mask plate, a baffle plate and an evaporation source which are located in the evaporation cavity; the to-be-evaporated substrate and the mask plate are oppositely arranged, the to-be-evaporated substrate and the mask plate are fixed to the side, close to the evaporation source, of the alignment mechanism, the mask plate is located on the side, close to the evaporation source, of the to-be-evaporated substrate, and the alignment mechanism drives the to-be-evaporated substrate and the mask plate to move at the same time; the baffle is located between the mask plate and the evaporation source and comprises an opening, and the evaporation source and the opening are at least partially overlapped in the direction perpendicular to the plane whe