Two-degree-of-freedom large precise instrument anti-micro-vibration platform
The invention provides a two-degree-of-freedom large precise instrument anti-micro-vibration platform which comprises a top plate, vertical driving devices, horizontal driving devices and supporting legs and is characterized in that the vertical driving devices are connected to the four corners of t...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a two-degree-of-freedom large precise instrument anti-micro-vibration platform which comprises a top plate, vertical driving devices, horizontal driving devices and supporting legs and is characterized in that the vertical driving devices are connected to the four corners of the bottom of the top plate respectively, the bottoms of the vertical driving devices are installed on the tops of the supporting legs, and the horizontal driving devices are connected to the supporting legs. A stand column is vertically installed in the middle of the bottom of the top plate, horizontal driving devices are installed on the left side, the right side, the front side, the rear side and the side of the stand column respectively, a cross beam is installed between the supporting legs, the bottoms of the horizontal driving devices are vertically connected with the cross beam, a position sensor and a speed sensor are further installed at the bottom of the top plate, and a controller is installed on the cros |
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