SEMICONDUCTOR SYSTEM AND OPERATING METHOD THEREOF

The invention discloses a semiconductor system and an operation method thereof, and the operation method of the semiconductor system comprises the steps: providing a system which comprises a layout pattern to a scanning electron microscope pattern prediction module and a novel pattern determination module, inputting a layout pattern to the novel pattern determination module, and outputting the layout pattern to the scanning electron microscope pattern prediction module; and the novel pattern determination module determines whether the layout pattern is a novel layout pattern, and if the layout pattern is determined to be the novel layout pattern after determination, the novel layout pattern is subjected to a manufacturing process step to form an SEM (scanning electron microscope) pattern, and the SEM pattern corresponds to the novel layout pattern. 本发明公开一种半导体系统及其运作方法，其中该半导体系统的运作方法包含提供一系统，该系统内包含有一布局图案至扫描电子显微镜图案预测模块以及一新颖图案判定模块，输入一布局图案至该新颖图案判定模块，且该新颖图案判定模块判断该布局图案是否为一新颖布局图案，以及若该布局图案经判断后确认为该新颖布局图案，则将该新颖布局图案进行一制作工艺