MEMS thermopile ultraviolet detector and preparation method thereof

The invention discloses an MEMS thermopile ultraviolet detector and a preparation method thereof, and relates to the technical field of semiconductors. The MEMS thermopile ultraviolet detector comprises an MEMS thermopile ultraviolet detection unit, a nano forest unit and a metal particle unit arranged on the peripheral surface of the nano forest unit, and the nano forest unit is arranged above the MEMS thermopile ultraviolet detection unit; the metal particle unit is used for increasing the ultraviolet radiation absorptivity, so that the high-sensitivity detection of the ultraviolet radiation at the wave band of 10-400 nanometers is realized, and the detection range is expanded while the detection sensitivity is improved. 本申请公开一种MEMS热电堆紫外探测器及其制备方法，涉及半导体技术领域。MEMS热电堆紫外探测器，包括：MEMS热电堆紫外探测单元、纳米森林单元和设置在所述纳米森林单元四周表面的金属颗粒单元，所述纳米森林单元设置在所述MEMS热电堆紫外探测单元上方；所述金属颗粒单元用于增加紫外辐射吸收率，从而提升实现对10-400纳米波段紫外辐射的高灵敏探测，在提高了探测灵敏度的同时扩大了检测范围。