Preparation method for preparing IGZO rotating target material through gel casting

The invention relates to the technical field of IGZO rotating target preparation, and particularly discloses a preparation method for preparing an IGZO rotating target material through gel casting. The preparation method comprises the following steps: (1) performing wet ball milling on nano indium oxide, nano gallium oxide, nano zinc oxide, deionized water, a functional group monomer, a dispersing agent, an initiator and a catalyst to obtain slurry; (2) mixing the slurry and IGZO sol, heating at 100-120 DEG C and 190-210 DEG C in sequence, and demolding to obtain a blank; and (3) heating, degreasing and sintering the blank in sequence, and bonding the sintered product on the surface of the stainless steel pipe to obtain the IGZO rotating target material. According to the preparation method, further agglomeration of the nano indium oxide, the nano gallium oxide and the nano zinc oxide in the heating degreasing and sintering process is limited, and the IGZO target material with higher density is obtained. 本申请涉及