Reduction furnace for polycrystalline silicon production and reduction method

The invention discloses a reduction furnace for polycrystalline silicon production and a reduction method, and belongs to the technical field of polycrystalline silicon production equipment. A lifting assembly is arranged on a supporting frame, an electrode and a silicon core rod are arranged on a b...

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Hauptverfasser: MA QIANGLONG, LU XIAOWEI, LI FENG, CHEN YANXI, DONG DEZHI, MA YINGZHONG, THE INVENTOR HAS WAIVED THE RIGHT TO BE MENTIONED, LYU XIONGQIANG, ZHANG YANHUI, WANG PANPAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a reduction furnace for polycrystalline silicon production and a reduction method, and belongs to the technical field of polycrystalline silicon production equipment. A lifting assembly is arranged on a supporting frame, an electrode and a silicon core rod are arranged on a base plate, the silicon core rod is located in a first cavity formed by a furnace body and the base plate, and a cleaning assembly is arranged on a first connecting plate; the second filter screen, the fixed shell and the second connecting disc form a second cavity, third fan blades are arranged on the first connecting shaft, a third gear is arranged at one end of the first connecting shaft, and a first gear ring is arranged at the bottom of the first connecting disc in the circumferential direction. A cleaning head on a cleaner moves to a base plate, the cleaning head cleans impurities on the base plate, the impurities and gas in the cleaner flow into a second cavity through a pipeline, the impurities and gas are f