Foreign matter removal device and foreign matter removal method

The invention provides a foreign matter removal device and a foreign matter removal method, which can improve foreign matter removal performance regardless of the structure of a structure formed on the surface of an object, and can remove foreign matters adhering to the object by using gas blown out...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGI DAISAKU, KAWANO TAKAHIRO, NAKAMURA TAKANORI, UKI DAISUKE, KANZAKI TOYOKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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