Foreign matter removal device and foreign matter removal method

The invention provides a foreign matter removal device and a foreign matter removal method, which can improve foreign matter removal performance regardless of the structure of a structure formed on the surface of an object, and can remove foreign matters adhering to the object by using gas blown out from a nozzle provided with a blowing port. The opening ratio of the two end parts of the blow-out opening is smaller than the opening ratio of the central part of the blow-out opening. 本发明提供异物除去装置和异物除去方法，不论形成在对象物的表面的结构物的结构如何都能够提高异物除去性能，在利用从形成有吹出口的喷嘴吹出的气体除去附着在对象物上的异物的异物除去装置中，所述吹出口的两端部的开口率小于该吹出口的中央部的开口率。