High-vacuum radio frequency plasma free radical thermocompression bonding all-in-one machine and bonding method

The invention discloses a high vacuum radio frequency plasma free radical thermocompression bonding all-in-one machine and a bonding method, a machine body is provided with a vacuum quartz tube cavity, a radio frequency coil is wound outside the vacuum quartz tube cavity, and the vacuum quartz tube...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KE SHAOYING, MENG WENHAO, HUANG ZHIWEI, WANG ZHANREN, ZHOU JINRONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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