High-vacuum radio frequency plasma free radical thermocompression bonding all-in-one machine and bonding method
The invention discloses a high vacuum radio frequency plasma free radical thermocompression bonding all-in-one machine and a bonding method, a machine body is provided with a vacuum quartz tube cavity, a radio frequency coil is wound outside the vacuum quartz tube cavity, and the vacuum quartz tube...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a high vacuum radio frequency plasma free radical thermocompression bonding all-in-one machine and a bonding method, a machine body is provided with a vacuum quartz tube cavity, a radio frequency coil is wound outside the vacuum quartz tube cavity, and the vacuum quartz tube cavity is provided with a cavity door; the vacuum quartz tube cavity is connected with a vacuumizing system; an electric air cylinder is arranged above the vacuum quartz tube cavity, and a lifting air cylinder rod of the electric air cylinder penetrates through the top of the cavity through a corrugated pipe connecting piece and is connected to an upper sample carrying table with a heating module; an electric air cylinder is arranged below the vacuum quartz tube cavity, and a lifting air cylinder rod of the electric air cylinder penetrates through the bottom of the cavity through a corrugated pipe connecting piece and is connected to a lower sample carrying table with a heating module; a touch screen control unit i |
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