Disassembly and assembly technology for halogen lamp of semiconductor equipment

The invention discloses a dismounting and mounting technology for a halogen lamp of semiconductor equipment, and the technology comprises the steps: carrying out the material pretreatment: selecting a tool material; selecting the diameter and the length of a tool material; a cutting method of the to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG YUNQIN, LIU QIAN, WANG XIN, WANG HAOLIN, LIU MEIYANG, LI XUBING, XUE JINGWU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a dismounting and mounting technology for a halogen lamp of semiconductor equipment, and the technology comprises the steps: carrying out the material pretreatment: selecting a tool material; selecting the diameter and the length of a tool material; a cutting method of the tool device; and the practical degree of the tool material is tested. The dismounting and mounting process comprises the following steps: controlling the force and angle for dismounting and mounting the halogen lamp; carrying out installation measurement on the installed halogen lamp; and the angle of dismounting the halogen lamp is controlled. The high-elasticity rubber product for manufacturing the tool can effectively protect the halogen lamp, the operation difficulty can be reduced through the design of the inverted circular truncated cone shape with the wide upper portion and the narrow lower portion, and the disassembly and assembly efficiency is effectively improved. The disassembly and assembly strength and a