Electromagnetic simulation method and system for diffraction optical design automation

The invention provides an electromagnetic simulation method and system for diffraction optical design automation, and the method can achieve the quick and accurate prediction of the diffraction field of a complex structure through the standard diffraction model of the standard diffraction unit of th...

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Bibliographische Detailangaben
Hauptverfasser: ZHOU PINGQIANG, JING YOULIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides an electromagnetic simulation method and system for diffraction optical design automation, and the method can achieve the quick and accurate prediction of the diffraction field of a complex structure through the standard diffraction model of the standard diffraction unit of the complex structure for the diffraction optical design automation, does not need a conventional electromagnetic simulation tool, and is high in simulation efficiency. Therefore, the bottleneck of the traditional electromagnetic simulation tool in memory and speed is overcome. The electromagnetic simulation time of a complex structure body is greatly shortened, and the requirement for a computer memory is not high; and electromagnetic optimization is carried out by adopting an advanced back propagation optimization algorithm, so that the diffraction field of the complex structural body can be rapidly and iteratively optimized. 本发明提供一种面向衍射光学设计自动化的电磁仿真方法以及系统,通过面向衍射光学设计自动化的复杂结构体的标准衍射单元的标准衍射模型,复杂结构体的衍射场就可以快速且准确地预测出来,不需要