Online monitoring method and system applied to semiconductor production
The invention provides an on-line monitoring method and system applied to semiconductor production. The method comprises the following steps: acquiring acquisition data of acquisition nodes corresponding to devices in semiconductor production through a LonWorks field bus; analyzing the collected dat...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides an on-line monitoring method and system applied to semiconductor production. The method comprises the following steps: acquiring acquisition data of acquisition nodes corresponding to devices in semiconductor production through a LonWorks field bus; analyzing the collected data, and determining whether each device is abnormal or not; when the abnormity occurs, abnormity reminding information is sent to each monitoring node corresponding to the abnormal equipment, and video data is acquired through a video acquisition module corresponding to each equipment; and generating an emergency processing record based on the abnormal reminding information and the video data. According to the on-line monitoring method applied to semiconductor production, the operation state of each device can be timely and efficiently determined, and the semiconductor production process can be effectively monitored.
本发明提供一种应用于半导体生产的在线监控方法及系统,其中方法包括:通过LonWorks现场总线获取半导体生产的各个设备对应的采集节点的采集数据;对采集数据进行分析,确定各个设备是否发生异常;当发生异常 |
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