Online monitoring method and system applied to semiconductor production

The invention provides an on-line monitoring method and system applied to semiconductor production. The method comprises the following steps: acquiring acquisition data of acquisition nodes corresponding to devices in semiconductor production through a LonWorks field bus; analyzing the collected data, and determining whether each device is abnormal or not; when the abnormity occurs, abnormity reminding information is sent to each monitoring node corresponding to the abnormal equipment, and video data is acquired through a video acquisition module corresponding to each equipment; and generating an emergency processing record based on the abnormal reminding information and the video data. According to the on-line monitoring method applied to semiconductor production, the operation state of each device can be timely and efficiently determined, and the semiconductor production process can be effectively monitored. 本发明提供一种应用于半导体生产的在线监控方法及系统，其中方法包括：通过LonWorks现场总线获取半导体生产的各个设备对应的采集节点的采集数据；对采集数据进行分析，确定各个设备是否发生异常；当发生异常