Resonance type temperature sensor with thin film metamaterial structure

The invention discloses a resonance type temperature sensor with a thin film metamaterial structure, which comprises a dielectric layer, a metamaterial layer consisting of metamaterial structures is arranged on the dielectric layer, and the metamaterial structures form a resonance structure unit. The film metamaterial structure temperature sensor provided by the invention adopts a metamaterial structure which is simple in design and adopts a microwave scattering type sensing principle, so that the temperature sensor has the characteristics of high quality factor, high sensitivity and capability of working in a GHz frequency band. 本发明公开了一种薄膜超材料结构谐振型温度传感器，包括介质层，介质层上设置有由超材料结构组成的超材料层，超材料结构构成谐振结构单元。本发明提供的薄膜超材料结构温度传感器采用设计简单的超材料结构，采用微波散射式传感原理，实现温度传感器品质因数高，灵敏度高，工作在GHz频段的特点。