Optical measurement apparatus, measurement method, and method of manufacturing semiconductor device

The optical measurement apparatus includes: an optical system that generates a pupil image of a measurement target using light; a polarization generator that generates polarized light from the light; a self-interference generator that generates a plurality of light beams divided from the pupil image...

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Bibliographische Detailangaben
Hauptverfasser: KIM WOOK-RAE, LI MINGJUN, ZHENG XIYAN, LEE SEUNG WOO, KIM KWANG-SOO, JANG SUNG-HO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The optical measurement apparatus includes: an optical system that generates a pupil image of a measurement target using light; a polarization generator that generates polarized light from the light; a self-interference generator that generates a plurality of light beams divided from the pupil image using polarized light and causes the plurality of light beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image and move the measurement target to the focus position based on the phase data. 光学测量设备包括:光学系统,其利用光生成测量目标的光瞳图像;偏振生成器,其从光生成偏振光;自干涉生成器,其利用偏振光生成从光瞳图像分割的多个光束,并且使多个光束彼此干涉以生成自干涉图像;以及图像分析单元,其被配置为从自干涉图像提取相位数据,并且基于相位数据将测量目标移动到聚焦位置。