Preparation method of aluminum nitride-based ceramic composite material and application of aluminum nitride-based ceramic composite material in electrostatic chuck

The invention relates to the technical field of aluminum nitride composite materials, and discloses a preparation method of an aluminum nitride-based ceramic composite material and application of the aluminum nitride-based ceramic composite material to an electrostatic chuck, and the preparation method comprises the following steps: mixing AlN powder and resistance-adjusting conductive medium powder, adding water and a dispersing agent, and carrying out wet ball milling by using aluminum nitride balls; the resistance-adjusting conductive medium powder is one or more of TiB2, TiN, MoO2 and MoC2; the resistance-adjusting conductive medium powder is one or more of TiB2, TiN, MoO2 and MoC2; and performing powder granulation by adopting centrifugal spray drying, and drying again to obtain the aluminum nitride-based ceramic composite material. The aluminum nitride ceramic has the advantages of good thermal conductivity, wear resistance, corrosion resistance and the like of the aluminum nitride ceramic, has the char