Novel naphthalimide sulfonate derivative, and photoacid generator and photoresist composition comprising same
The present invention relates to a naphthalimide sulfonate derivative, and a photoacid generator and a photoresist composition comprising the naphthalimide sulfonate derivative, and more particularly, to a photoresist composition comprising the naphthalimide sulfonate derivative, the present inventi...
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Format: | Patent |
Sprache: | chi ; eng |
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