Novel naphthalimide sulfonate derivative, and photoacid generator and photoresist composition comprising same

The present invention relates to a naphthalimide sulfonate derivative, and a photoacid generator and a photoresist composition comprising the naphthalimide sulfonate derivative, and more particularly, to a photoresist composition comprising the naphthalimide sulfonate derivative, the present inventi...

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Bibliographische Detailangaben
Hauptverfasser: LEE WON-JUNG, CUI WEINA, LEE DEUK-RAK, OH CHUN-RIM, CHOI DAE-HYUK, CHOI JI-EUN, KIM MIN-JUNG
Format: Patent
Sprache:chi ; eng
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