Proton exchange device for manufacturing lithium niobate optical waveguide

The invention discloses a proton exchange device for manufacturing a lithium niobate optical waveguide, which comprises a furnace body, a heating pipe, a clamp and a manipulator, the heating pipe is arranged inside the furnace body, the clamp is used for fixing a wafer, the manipulator is connected with the clamp, the heating pipe comprises an outer sleeve and a pipe body, the outer sleeve is arranged outside the pipe body, and the outer sleeve is arranged outside the pipe body. An inner cavity of the tube body is separated from a cavity of the outer-layer sleeve, the clamp is movably arranged in the inner cavity of the tube body, a proton exchange substance is contained in the cavity of the outer-layer sleeve, and a liquid transfer mechanism is further arranged between the cavity of the outer-layer sleeve and the inner cavity of the tube body. And the heat exchanger is used for transferring the molten proton exchange substance into the inner cavity of the tube body. The invention solves the problems of poor