8-inch or smaller bearing head and chemical mechanical polishing equipment

The invention discloses a bearing head with the size of 8 inches or smaller and chemical mechanical polishing equipment. The bearing head comprises a base, a retaining ring, an air film, a pressing ring, a first clamping ring and a second clamping ring. The gas film comprises a circular bottom plate and a side wall vertically extending upwards along the periphery of the bottom plate, and the top of the side wall extends inwards and then is bent outwards to extend to be pressed and fixed by the pressing ring and the retaining ring to form a bent part. The gas film further comprises an inner partition wall which is formed by horizontally extending inwards from the side wall and then extending upwards. And the first clamping ring is used for clamping and positioning the bent part along the outer side surface of the bent part of the side wall, and the second clamping ring is used for clamping and positioning the bent part along the inner side surface of the bent part of the side wall. 本发明公开了一种8英寸或更小尺寸的承载头和化学机械抛光设