Novel laser alignment detection system and detection method

The novel laser alignment detection system comprises a test substrate and a machine table, the test substrate is provided with a first end face and a second end face which are deviated from each other, and preset target positions are symmetrically marked on the first end face and the second end face...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU XIAOLEI, MA LIANGLIANG, YAO GUANGYAN, LYU PENG, WU DAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The novel laser alignment detection system comprises a test substrate and a machine table, the test substrate is provided with a first end face and a second end face which are deviated from each other, and preset target positions are symmetrically marked on the first end face and the second end face; the jig is arranged on the machine table, used for clamping a test substrate and connected with a driving assembly, and the jig can be driven by the driving assembly to move in the first direction; the laser drilling mechanism is arranged on the machine table and comprises a first emitting part and a second emitting part, and the first emitting part and the second emitting part oppositely emit laser in the second direction perpendicular to the first direction so as to ablate a preset target position on the test substrate to form a blind hole set; the light sensing mechanism is arranged on one side of the laser drilling mechanism in the first direction and used for conducting light transmitting detection on the bl