Electric heating mixing cavity DFB laser and manufacturing method thereof

The invention discloses an electric heating mixing cavity DFB laser and a manufacturing method thereof, the electric heating mixing cavity DFB laser structurally comprises an epitaxial structure, negative electrode metal, positive electrode metal and heating electrode metal, and the front surface of...

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Hauptverfasser: DING ZHENWEN, HUANG ZHUYANG, CHENG BIN, SUN WEIZHONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses an electric heating mixing cavity DFB laser and a manufacturing method thereof, the electric heating mixing cavity DFB laser structurally comprises an epitaxial structure, negative electrode metal, positive electrode metal and heating electrode metal, and the front surface of the epitaxial structure is provided with a ridge waveguide; the epitaxial structure comprises a phase shift region and an active region along the cavity length direction of the laser, wherein the phase shift region is close to the reflection end surface; the epitaxial structure of the active region comprises an active layer and a grating; the epitaxial structure of the phase shift region does not comprise an active layer and a grating but comprises a passive waveguide layer; the positive electrode metal covers more than 70% of the ridge waveguide of the active area, and the heating electrode metal covers the ridge waveguide of the phase shift area and is spaced from the positive electrode metal. The active area an