Mach-Zehnder electro-optical modulator and modulation method

The invention provides a Mach-Zehnder electro-optical modulator and a modulation method, the modulator comprises a silicon substrate layer, a first silicon dioxide layer covers the silicon substrate layer, a first coplanar waveguide electrode is embedded in the first silicon dioxide layer, a waveguide layer covers the first silicon dioxide layer, and a second coplanar waveguide electrode is embedded in the waveguide layer. The first coplanar waveguide electrode is in contact connection with the waveguide layer; a second coplanar waveguide electrode is arranged on the surface, deviating from the first silicon dioxide layer, of the waveguide layer; a second silicon dioxide layer is coated in a gap formed by the waveguide layer and the second coplanar waveguide electrode; wherein the first coplanar waveguide electrode and the second coplanar waveguide electrode are used for applying voltage signals with the same frequency and the same phase. 本申请提供了一种马赫曾德尔电光调制器及调制方法，所述调制器包括硅基底层，所述硅基底层上覆设有第一二氧化硅层，所述第一二氧化硅层中嵌设有第一共面