Hybrid integrated phased array laser radar chip

The invention provides a hybrid integrated phased array laser radar chip. The hybrid integrated phased array laser radar chip comprises an SOI substrate; a plurality of III-V group semiconductor lasers; and a plurality of groups of phased array laser radar chips. Wherein each phased array laser rada...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG MINGJIN, LIU WENZHEN, ZHOU SHENGMIN, SI JIAHAO, ZHENG WANHUA, TANG CHENYAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a hybrid integrated phased array laser radar chip. The hybrid integrated phased array laser radar chip comprises an SOI substrate; a plurality of III-V group semiconductor lasers; and a plurality of groups of phased array laser radar chips. Wherein each phased array laser radar chip comprises a spot-size converter which is connected with the III-V group semiconductor laser; the beam splitter group is connected with the spot-size converter and is used for splitting the input optical signal into a plurality of beams of optical signals; the phase shifter group is connected with the beam splitter group and comprises a plurality of sub-phase shifters, and each beam of optical signal in the multiple beams of optical signals is connected to one sub-phase shifter; the grating antenna is used for combining the optical signals transmitted by the sub phase shifters and transmitting the optical signals outwards; the plurality of groups of phased array laser radar chips and the plurality of III-V gr