COMPOSITION FOR FORMING PROTECTIVE FILM, PROTECTIVE FILM, METHOD FOR FORMING PROTECTIVE FILM, AND METHOD FOR MANUFACTURING SUBSTRATE
The invention provides a composition for forming a protective film, a protective film, a method for forming the protective film, and a method for manufacturing a patterned substrate, wherein the composition has excellent coating property. A composition for forming a protective film for forming a pro...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention provides a composition for forming a protective film, a protective film, a method for forming the protective film, and a method for manufacturing a patterned substrate, wherein the composition has excellent coating property. A composition for forming a protective film for forming a protective film only on the peripheral edge of a substrate, the composition containing a solvent and a compound having an aromatic ring, the solvent including a first solvent having a normal boiling point of 156 DEG C or more and less than 300 DEG C.
本发明提供一种涂敷性优异的保护膜形成用组合物、保护膜、保护膜的形成方法、及经图案化的基板的制造方法。一种保护膜形成用组合物,用于仅在基板的周缘部形成保护膜,所述保护膜形成用组合物含有具有芳香环的化合物与溶媒,所述溶媒包含标准沸点为156℃以上且未满300℃的第一溶媒。 |
---|