Piezoelectric planar motion device driven by double inner cross stators and working mode
The invention discloses a piezoelectric planar motion device driven by double inner cross stators and a working mode, the device is mainly composed of a stator assembly, a mover assembly and a base, the stator assembly is connected with the stator assembly through a driving foot of the stator assemb...
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Format: | Patent |
Sprache: | chi ; eng |
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