Piezoelectric planar motion device driven by double inner cross stators and working mode

The invention discloses a piezoelectric planar motion device driven by double inner cross stators and a working mode, the device is mainly composed of a stator assembly, a mover assembly and a base, the stator assembly is connected with the stator assembly through a driving foot of the stator assemb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LONG YUFAN, YAN YINQI, LI JI, LI CHENJIE, HE HONGLIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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