Piezoelectric planar motion device driven by double inner cross stators and working mode

The invention discloses a piezoelectric planar motion device driven by double inner cross stators and a working mode, the device is mainly composed of a stator assembly, a mover assembly and a base, the stator assembly is connected with the stator assembly through a driving foot of the stator assemb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LONG YUFAN, YAN YINQI, LI JI, LI CHENJIE, HE HONGLIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a piezoelectric planar motion device driven by double inner cross stators and a working mode, the device is mainly composed of a stator assembly, a mover assembly and a base, the stator assembly is connected with the stator assembly through a driving foot of the stator assembly, the mover assembly is connected with a bottom plate through a rolling body arranged on the bottom plate and a mover to form a rolling pair, and the bottom plate is connected with the mover assembly through a driving foot of the mover assembly. According to the stator assembly, a double-inner-cross-shaped structure serves as a stator base body, resonance or near-resonance of a three-phase specific working mode of the stator assembly is excited through a plurality of piezoelectric ceramic pieces attached to the stator base body, and eight driving feet on the stator base body are driven to generate a two-phase orthogonal advancing elliptic motion track. Accordingly, the mover assembly is pushed to move in the x di