Flange air curtain system and vacuum equipment

The invention provides a flange air curtain system and vacuum equipment. The flange air curtain system comprises a high-pressure air source, a pressure regulating valve set, an air conveying pipeline, an air curtain flange, a back air flange and a sealing piece. The high-pressure air source is conne...

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Bibliographische Detailangaben
Hauptverfasser: WANG FEI, SUN SONGGANG, LI CANLUN, LI ZHUOHUI, LIU HAIJING, WANG GUOFANG, LI SHAOJIE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a flange air curtain system and vacuum equipment. The flange air curtain system comprises a high-pressure air source, a pressure regulating valve set, an air conveying pipeline, an air curtain flange, a back air flange and a sealing piece. The high-pressure air source is connected with the pressure regulating valve set, the pressure regulating valve set is connected with the air curtain flange through the air conveying pipeline, the air curtain flange is connected with the back air flange, and the sealing piece is arranged between the air curtain flange and the back air flange. A turbulent flow air curtain is formed on the outer side of the sealing element through gas which does not interfere with a detection substance, the abundance of the detection substance at the sealing element part is reduced, the probability that interference gas permeates into a vacuum cavity in an environment atmosphere is greatly reduced, the detection precision is improved, meanwhile, the effects of dust remo