Transmission electron microscope in-situ thermal parameter test chip and preparation method thereof

The invention discloses a transmission electron microscope in-situ thermal parameter test chip and a preparation method thereof, the chip is an MEMS device, and two suspended platforms in bilateral symmetry are formed on a silicon substrate; each suspended platform structure comprises a bottom-layer...

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Bibliographische Detailangaben
Hauptverfasser:	NIE MENG, YIN KUIBO, JIN ZHANRUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention discloses a transmission electron microscope in-situ thermal parameter test chip and a preparation method thereof, the chip is an MEMS device, and two suspended platforms in bilateral symmetry are formed on a silicon substrate; each suspended platform structure comprises a bottom-layer electric heating insulation protection layer, a resistor, a metal electrode and a metal heat reflecting mirror are sequentially arranged on the bottom-layer electric heating insulation protection layer at intervals, the metal heat reflecting mirrors are located on the opposite inner sides of the two suspended platforms, and the resistor is covered with a top-layer electric heating insulation protection layer. The upper layer and the lower layer of the resistor structure are respectively provided with an electric heating insulation protection layer, so that the electric heating insulation protection layers are isolated from the outside, and the influence of the external environment on electrical signals of the temp