Surface processing method of aluminum-titanium alloy target material

The invention provides a surface processing method of a titanium-aluminum alloy target. The surface processing method comprises the following steps: turning a to-be-processed surface of the titanium-aluminum alloy target by using a cutter; turning liquid used in the turning treatment process is an a...

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Bibliographische Detailangaben
Hauptverfasser: PAN JIE, YAO LIJUN, WANG XUEZE, LIANG ZEMIN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a surface processing method of a titanium-aluminum alloy target. The surface processing method comprises the following steps: turning a to-be-processed surface of the titanium-aluminum alloy target by using a cutter; turning liquid used in the turning treatment process is an aqueous solution of emulsified liquid, and the volume concentration of the aqueous solution of the emulsified liquid is 11-15 wt%; and the model of the cutter is CCGX120404. According to the surface machining method provided by the invention, the turning liquid is matched with the cutter, so that the service life of the cutter can be prolonged, and the surface roughness of the titanium-aluminum alloy target material can be reduced to 0.3 mu m or below. 本发明提供了一种钛铝合金靶材的表面加工方法,所述表面加工方法包括:使用刀具对钛铝合金靶材的待加工面进行车削处理;车削处理过程中使用的车削液为乳化液的水溶液,乳化液的水溶液的体积浓度为11-15wt%;所述刀具的型号为CCGX120404。本发明提供的表面加工方法通过车削液与刀具的配合,能够延长刀具的使用寿命,且能够将钛铝合金靶材的表面粗糙度降低至0.3μm以下。