Semiconductor device temperature and thermal resistance composition measuring device based on thermal reflectivity

The invention discloses a semiconductor device temperature and thermal resistance composition measuring device based on thermal reflectivity, and relates to the field of temperature measurement. A semiconductor device is fixed on a constant-temperature platform, the constant-temperature platform is...

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Bibliographische Detailangaben
Hauptverfasser: MENG XIANWEI, ZHANG YAMIN, ZHAI YUWEI, FENG SHIWEI, CHENG HAOXUAN, WEN QIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a semiconductor device temperature and thermal resistance composition measuring device based on thermal reflectivity, and relates to the field of temperature measurement. A semiconductor device is fixed on a constant-temperature platform, the constant-temperature platform is stabilized at different temperatures through a heating power supply, and a photo-thermal reflection measurement system formed by an optical fiber, a laser, a circulator and an acquisition system is used for measuring the reflectivity of a to-be-measured area of the semiconductor device at different temperatures. And the photo-thermal reflection coefficient Cth of the to-be-measured area is obtained through linear fitting. Maintaining the constant temperature of the constant-temperature platform, and controlling a driving circuit to apply different electrical excitations to the semiconductor device through a computer; and meanwhile, the computer synchronously controls the acquisition card to start to acquire the vol