Force feedback high-sensitivity MOEMS integrated acceleration sensor

The invention belongs to the technical field of sensors, and particularly relates to a force feedback high-sensitivity MOEMS integrated acceleration sensor, which meets the requirements of the acceleration sensor on a low-rigidity transverse-interference-resistant mechanical sensitive structure and a high-performance force feedback mode, and comprises an external shell, an electromagnetic feedback part, a mechanical sensitive structure and an optical detection module, the electromagnetic feedback part comprises a permanent magnet and a circular coil, the mechanical sensitive structure comprises a mass block and a cantilever beam, and the optical detection module comprises a reflective film, a grating, a glass plane, a photoelectric detector, a laser and a substrate. Through combination of a low-rigidity mechanical sensitive structure and an optical detection technology, the sensitivity of the acceleration sensor is improved, the transverse sensitivity is reduced through the cantilever beams which are rotation