METHOD OF IMAGING AND MILLING A SAMPLE

The invention relates to a method for grinding and imaging a sample. The method includes the steps of providing an imaging system and abrading a beam source. The method comprises the steps of: abrading a sample using an abrasive beam from the abrasive beam source to remove layers of the sample; and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GIRI VIPUL, BRONISLAV PAVEL, DAVID PASCAL, RADKE SCOTT, JAROSLAV VADIM, K. GIRI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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