Repair method of nanoimprint master mold

The invention discloses a method for repairing a nanoimprint master mold, the nanoimprint master mold is made of template glue, and the nanoimprint master mold is attached with sub-film glue to be cleaned and removed; the template glue is organic silicon resin, and the sub-mold glue is polyester res...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YIN YAGE, HAN XINGJUN, LI YING, WU XIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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