Elliptic polarization measurement system

An ellipsometry system comprises a constant temperature mechanism, a displacement table, an incidence mechanism, a light receiving mechanism and a detection mechanism. The constant temperature mechanism is suitable for placing a to-be-tested sample and keeping the temperature of the to-be-tested sam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUO YONGHENG, LIU RUNZE, JIANG GUOQIU, PAN JIANWEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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