Elliptic polarization measurement system
An ellipsometry system comprises a constant temperature mechanism, a displacement table, an incidence mechanism, a light receiving mechanism and a detection mechanism. The constant temperature mechanism is suitable for placing a to-be-tested sample and keeping the temperature of the to-be-tested sam...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | An ellipsometry system comprises a constant temperature mechanism, a displacement table, an incidence mechanism, a light receiving mechanism and a detection mechanism. The constant temperature mechanism is suitable for placing a to-be-tested sample and keeping the temperature of the to-be-tested sample in a constant temperature state; a displacement stage configured to be retractable in different directions; the incident mechanism is mounted on the displacement table and is suitable for enabling the first linearly polarized light to be incident to a sample to be detected, so that the first linearly polarized light is reflected on the sample to be detected, and elliptically polarized light is obtained; the light receiving mechanism is mounted on the displacement table and is suitable for converting elliptically polarized light into circularly polarized light; and the detection mechanism is mounted on the displacement table, and is suitable for enabling the focused laser to enter the surface of the sample to be |
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