Terahertz photo-thermal electric detector and preparation method thereof
The invention provides a terahertz photo-thermal electric detector, which is characterized by comprising a substrate; the channel layer is arranged on the substrate and is used for carrying out photo-thermal-electric conversion; the source electrode and the drain electrode are arranged on the channe...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides a terahertz photo-thermal electric detector, which is characterized by comprising a substrate; the channel layer is arranged on the substrate and is used for carrying out photo-thermal-electric conversion; the source electrode and the drain electrode are arranged on the channel layer and are used for collecting electric signals; and the coupled antenna is arranged between the source electrode and the drain electrode, is close to the source electrode and is used for localizing the terahertz light field, so that the channel layer generates a temperature difference. The invention further provides a preparation method of the terahertz photo-thermal electric detector, and the preparation method is used for the terahertz photo-thermal electric detector. The terahertz photo-thermal electric detector and the preparation method thereof provided by the invention have the characteristics of simple structure, high electromagnetic coupling efficiency, strong detection capability and simple preparati |
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