Electric field sensor
The invention relates to an electric field sensor, and relates to the technical field of sensors. The electric field sensor comprises a base frame, a fixed electrode and a piezoelectric driving beam, the fixed electrode is connected with the base frame, the piezoelectric driving beam is connected wi...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an electric field sensor, and relates to the technical field of sensors. The electric field sensor comprises a base frame, a fixed electrode and a piezoelectric driving beam, the fixed electrode is connected with the base frame, the piezoelectric driving beam is connected with the base frame, the piezoelectric driving beam comprises multiple sections of driving beams, the angle between any two adjacent sections of driving beams in the multiple sections of driving beams is smaller than 180 degrees, and the angle between any two adjacent sections of driving beams in the multiple sections of driving beams is smaller than 180 degrees. The driving circuit is used for applying driving voltage to the piezoelectric driving beams, the driving voltage applied to the piezoelectric driving beams drives the multiple sections of driving beams to move in the same direction in the vertical direction, the movable electrode is connected with the tail ends of the piezoelectric driving beams, and when th |
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